Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1988-09-09
1991-03-19
Walberg, Teresa J.
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
219382, 219411, 118729, F27B 516
Patent
active
050013270
ABSTRACT:
An apparatus for containing semiconductor wafers and performing heat treatment thereon. Heaters disposed in a high temperature furnace form at least one heating space therein. An insertion and retrieval aperture is disposed at the lower portion of each heating space for allowing passage of wafers therethrough. Each of the heating spaces is adapted to receive one or two wafers and to provide simultaneous and uniform heat treatment on the wafers.
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Hirasawa Shigeki
Honma Kazuo
Komatsu Toshihiro
Nagazomo Hiroto
Sakai Akihiko
Hitachi , Ltd.
Walberg Teresa J.
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