Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate
2007-09-18
2007-09-18
Chang, Audrey (Department: 2872)
Optical: systems and elements
Having significant infrared or ultraviolet property
Multilayer filter or multilayer reflector
C359S350000, C430S005000
Reexamination Certificate
active
09784800
ABSTRACT:
An apparatus and method for optimizing a pellicle for off-axis transmission are disclosed. A pellicle includes a thin film optimized for transmission of off-axis incident light at a desired angle. The pellicle further includes an optical thickness greater than a design thickness by less than or equal to approximately one-quarter of an exposure wavelength.
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Alpay Hakki U
Gordon Joseph S
Hughes Gregory P
Kalk Franklin D
Baker & Botts L.L.P.
Chang Audrey
Toppan Photomasks, Inc.
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