Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Patent
1997-02-07
1999-02-02
Phan, James
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
359199, 359200, 359201, 359202, 359212, 359213, 359214, 359223, 235467, G02B 2608
Patent
active
058672974
ABSTRACT:
An optical scanning system includes a light source to generate a light beam. An oscillatory microelectromechanical system including a mirror deflects the light beam in a predetermined manner. The light source and microelectromechanical system are formed in a silicon substrate. Rotational shafts in the microelectromechanical system facilitate oscillatory movement of the mirror.
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Kiang Meng-Hsiung
Lau Kam Y.
Muller Richard S.
Solgaard Olav
Galliani William S.
Phan James
The Regents of the University of California
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