Apparatus and method for optical inspection

Details Apparatus and method for optical inspection Apparatus and method for optical inspection

2006-10-20

2010-11-02

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

07826047

ABSTRACT:
The present invention provides a variety of optical functions so as to be applicable to various kinds of objects to be inspected. For each of the optical functions, the invention accumulates contrasts (brightness differences), etc. of defects to be detected (DOI) and false defects not to be detected (nuisance), and efficiently selects parameters advantageous for inspection with high sensitivity and low nuisance ratio. A wavelength band, an illumination scheme, and filtering parameters can be selected for an optical system.

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