Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1988-09-27
1990-10-23
McGraw, Vincent P.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356355, G01B 902
Patent
active
049647261
ABSTRACT:
A dimension of an object disposed on a substrate, such as the width of a line of material deposited on a substrate in an integrated circuit manufacturing procedure, is measured by directing a plane wave of electromagnetic energy of predetermined dimensions toward the object at a predetermined angle of incidence. Electromagnetic energy scattered from two predetermined parts or features, such as the edges, of the object are combined so that they produce an interference pattern in space varying between maxima and minima. The characteristics of the interference pattern permit the dimension of the object to be deduced.
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Sheppard et al., "Image Formation in the Scanning Microscope", Optica Acta, vol. 24, No. 10, pp. 1051-1073, 1977.
Kleinknecht Hans P.
Knop Karl H.
General Electric Company
Glick K. R.
McGraw Vincent P.
Turner S. A.
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