Apparatus and method for operating a micromechanical switch

Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive

Reexamination Certificate

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Details

C335S124000

Reexamination Certificate

active

06246305

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to a micromechanical switch and a method for operating the micromechanical switch wherein a permanent magnet is moved between two positions, one position where the micromechanical switch is normally open and another position where the micromechanical switch is normally closed.
2. Discussion of Related Art
Conventional micro switches that operate between an open position and a closed position use electrostatic forces, elastic forces or thermally-induced forces to operate the micro switch. Conventional electrostatically actuated switches and relays experience excessive charge build-up which causes a magnitude of a closing force, which is necessary to operate the micro switch, to change over time.
SUMMARY OF THE INVENTION
It is one object of this invention to provide a micromechanical switch that is operated between a normally closed position and a normally open position by moving a permanent magnet between two positions.
It is another object of this invention to provide a micromechanical switch that electromagnetically draws a free end of a cantilever arm toward a first conductive layer or a second conductive layer to form a normally closed conductive path or a normally open conductive path.
It is another object of this invention to provide a micromechanical switch which uses magnetic forces to transmit externally acting forces necessary to open and close the micromechanical switch.
It is yet another object of this invention to provide a micromechanical switch that can be manufactured using conventional integrated circuit processing techniques.
It is still another object of this invention to provide a micromechanical switch wherein contacting surfaces that complete a conductive path are hermetically sealed and isolated from an external environment in which the switch body resides.
The above and other objects of this invention are accomplished with a micromechanical switch that has a magnet which is moved between two positions to set the micromechanical switch in a normally closed position or a normally open position. In one preferred embodiment of this invention, the magnet moves within a slot at least partially formed by primary openings in a first conductive layer and in a second conductive layer. However, it is apparent that several other various magnet configurations, path configurations and/or mechanical elements can be used to move the magnet between the two positions.
An actuator is used to selectively move the magnet between the two positions. The actuator may be a pushbutton switch or any other suitable mechanical switch used to move the magnet between two positions. The actuator can be automatically or manually operated.
A contact element is moveably mounted between two different positions, one position within one secondary opening of the first conductive layer and another position within another secondary opening within the second conductive layer. In one preferred embodiment of this invention, when the magnet is in the first position, the contact element is positioned within or bridges the secondary opening of the first conductive layer, and when the magnet is in the second position, the contact element is positioned within or bridges the secondary opening of the second conductive layer.
The contact element can be mounted to or integral with a free end of a cantilever arm. The cantilever arm preferably has a fixed end secured to the same substrate on which the first conductive layer and/ or the second conductive layer is supported. It is apparent that suitable mechanical arrangements can be used to allow the contact element to move between the secondary openings of the first conductive layer and of the second conductive layer.
The magnetic forces used to open and close the micromechanical switch of this invention can be of several orders of magnitude stronger than other conventional electrostatic forces, elastic forces or gravitational forces necessary to operate other conventional micromechanical switches. There is an apparent need to provide a micromechanical switch that uses a moveable magnet to operate the micromechanical switch between a normally open position and a normally closed position. One preferred embodiment of this invention is particularly suited for satisfying such need, by using a contact element of a free end of a cantilever arm to move toward either the first conductive layer or the second conductive layer upon electromagnetic demand from electromagnetic forces acting through the first conductive layer or the second conductive layer.


REFERENCES:
patent: 5872496 (1999-02-01), Asada et al.
patent: 6040749 (1999-02-01), Youngner et al.
Micromachined Magnetostatic Switches, NASA Tech Briefs, Oct., 1998, p. 58.
Technical Support Package to Micromachined Magnetostatic Switches, Oct., 1998, NASA Tech Brief, vol. 22, No. 10.
“Electrostatically Actuated Micromechanical Switches Using Surface Micromachining”, Northeastern University web site: www.ece.neu.edu/edsnu/zavrocky/mf1/programs/relay.html. 8 pp., circa: Jan. 13, 1998.

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