Apparatus and method for obtaining three dimensional surface con

Details Apparatus and method for obtaining three dimensional surface con Apparatus and method for obtaining three dimensional surface con

1985-07-10

1987-04-14

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

250237G, G01B 1124

Patent

active

046573941

ABSTRACT:
Phase measurements of deformed grating images are used in performing improved optical profilometry. Individual line profiles are obtained at a series of rotational increments of a body. A full 360 degree surface profile, or a portion thereof, can then be generated.

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patent: 4349277 (1982-09-01), Mundy et al.
patent: 4373804 (1983-02-01), Pryor et al.
Cline et al., Applied Optics, vol. 21, No. 24, Dec. 15, 1982, pp. 4481-4488.

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