Apparatus and method for observing defect having marks making me

Details Apparatus and method for observing defect having marks making me Apparatus and method for observing defect having marks making me

1998-08-24

2000-09-12

Le, Que T.

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

2502013, G01N 2188

Patent

active

061181331

ABSTRACT:
A detect observing apparatus according to the present invention has a purpose for forming an observing specimen by using a TEM and the like in a positive and simple manner and is used in observation of defect or foreign matter in an object to be tested by means of a laser tomography and includes an illumination means for illuminating observing laser light onto the object to be tested, and a microscope for observing the illuminated object to be tested, the apparatus further comprises a marking means for forming marks at a plurality of points on a surface of the object to be tested in the vicinity of the defect or foreign matter to be observed under the microscope, and a position detecting means for detecting positions of the plurality of marks formed on the surface of the object to be tested and a position of the observed defect or foreign matter through the microscope.

REFERENCES:
patent: 5663569 (1997-09-01), Hayano

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