Apparatus and method for non-contact surface voltage probing by

Details Apparatus and method for non-contact surface voltage probing by Apparatus and method for non-contact surface voltage probing by

1991-02-11

1992-09-22

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 96, 324158D, G01R 3100

Patent

active

051500434

ABSTRACT:
An apparatus and method for non-contact sensing electrical potentials of selected regions on the surface of a sample are provided. A typical sample is an integrated circuit, electronic device, or semiconductor material. The sample is positioned within a vacuum chamber and irradiated with an ultraviolet light beam so that the material emits electrons by the photoelectric effect. The electrons have kinetic energies which are variable according to the electrical potential of the surface of the material. Emitted electrons having kinetic energies within a predetermined range are selected by an electron energy analyzer. An electron detector receives the selected electrons and produces electrical signals corresponding to the energies of said selected electrons. In another embodiment of the invention, a modulated light beam other than the ultraviolet light probe beam irradiates the material in order to produce time varying modulation of the photoelectron energy spectrum.

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"Picosecond Photoelectron Scanning Electron Microscope for Testing of Intated Circuits", by May et al, applied Phys. Lett., vol. 51, #2, Jul. 13, 1987, pp. 145-147.

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