Optics: measuring and testing – For light transmission or absorption
Reexamination Certificate
2011-04-05
2011-04-05
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
For light transmission or absorption
C324S754210, C324S754230, C372S038100, C372S038010
Reexamination Certificate
active
07920265
ABSTRACT:
In a modulated optical reflectance (MOR) system, a laser noise suppression technique utilizes a reference beam split optically from a probe laser prior to injection of a beam from the probe laser into an MOR signal path. The reference beam and a probe beam reflected from the sample are sent to first and second detectors, which produce first and second signals. A signal combiner receives the second signal at a first input and produces a combiner signal that corresponds to a difference between signals applied to the first and a second input. A level balancer receives the first signal and a signal derived from the combiner signal and produces a balancer output that is coupled to the second input of the signal combiner. The combination of the balancer output and the second signal tends to cancel out an average value of the second signal from the combiner signal.
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Akanbi Isiaka O
Chowdhury Tarifur R.
Isenberg Joshua D.
JDI Patent
Kla-Tencor Corporation
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