Apparatus and method for mounting micromechanical fluid control

Details Apparatus and method for mounting micromechanical fluid control Apparatus and method for mounting micromechanical fluid control

1999-07-09

2000-09-26

Fox, John

Fluid handling

Systems

With flow control means for branched passages

137271, F16K 1110

Patent

active

06123107&

ABSTRACT:
An apparatus for mounting micromechanical fluid control components includes a manifold interface plate adaptable for connection to a manifold substrate oriented in a horizontal plane. The manifold interface plate receives mounting stress forces from the manifold substrate along the horizontal plane. An orthogonal component plate is connected to the manifold interface plate in a vertical plane with respect to the horizontal plane of the manifold substrate. The orthogonal component plate includes an orthogonal mounting surface with a micromechanical fluid control component mounted on it. The position of the micromechanical fluid control component on the orthogonal mounting surface substantially isolates the micromechanical fluid control component from the mounting stress forces.

REFERENCES:
patent: 3589387 (1971-06-01), Raymond
patent: 5964239 (1999-10-01), Loux et al.

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