Apparatus and method for monitoring power of a UV laser

Details Apparatus and method for monitoring power of a UV laser Apparatus and method for monitoring power of a UV laser

2006-08-03

2010-12-07

Harvery, Minsun (Department: 2828)

Coherent light generators

Particular active media

Gas

C372S061000

Reexamination Certificate

active

07848378

ABSTRACT:
An excimer laser includes a chamber for containing laser gas, electrodes in the chamber disposed to excite the laser gas, thereby producing optical emissions, first and second mirrors arranged to form a resonator cavity, and a detector disposed to receive a portion of light transmitted through the first mirror. The first mirror is more reflective than the second mirror.

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