Apparatus and method for method for spatially- and spectrally-re

Details Apparatus and method for method for spatially- and spectrally-re Apparatus and method for method for spatially- and spectrally-re

1991-06-26

1993-03-09

Evans, F. L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356318, 356328, 356334, 356346, 2504581, G01J 318, G01J 326, G01N 2164

Patent

active

051929805

ABSTRACT:
A scanning optical microscope or mapping system for spectrally-resolved measurement of light reflected, emitted or scatttered from a specimen is disclosed, in which the spectrally-resolving element is integrated into the detection arm of the microscope or mapping system to result in good photon collection efficiency as well as good spectral and spatial resolution. A confocal version of the microscope is disclosed which will be of particular interest in fluorescence microscopy, and the non-confocal mapping system will be of particular interest in photoluminescence mapping of semiconductor wafers.

REFERENCES:
patent: 4844617 (1989-07-01), Kelderman et al.

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