Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-04-18
2006-04-18
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07030995
ABSTRACT:
An interferometry method including: i) forming an optical interference image by combining different portions of an optical wave front reflected from a pair of surfaces; ii) recording an interference signal at different locations of the optical interference image in response to varying the relative position of the two surfaces over a range of positions; iii) transforming the interference signal for at least one of the locations to produce a spectrum having a peak at a spectral coordinate corresponding to the variation in the relative position of the two surfaces over a range of positions; iv) identifying the spectral coordinate of the peak; and v) for each location, extracting the spectral phase of the interference signal at the coordinate of the peak. For example, the method may further include, for each of the different locations, determining a surface profile of one of the surfaces based on the spectral phase of the interference signal at each of the multiple locations.
REFERENCES:
patent: 3708229 (1973-01-01), Pircher
patent: 4594003 (1986-06-01), Sommargren
patent: 4732483 (1988-03-01), Biegen
patent: 5229304 (1993-07-01), Chang et al.
patent: 5231468 (1993-07-01), Deason et al.
patent: 5303033 (1994-04-01), Matsuzaki
patent: 5398113 (1995-03-01), de Groot
patent: 5473434 (1995-12-01), de Groot
patent: 5557408 (1996-09-01), Kanaya
patent: 5671050 (1997-09-01), de Groot
patent: 5739906 (1998-04-01), Evans et al.
patent: 6006128 (1999-12-01), Izatt et al.
patent: 6028670 (2000-02-01), Deck
patent: 6359692 (2002-03-01), de Groot
patent: 6597460 (2003-07-01), Groot et al.
patent: 6643024 (2003-11-01), Deck et al.
patent: WO 02/12825 (2002-02-01), None
L. Deck; “Measurements using Fourier-Transform Phase Shifting Interferometry”, Proc. ASPE 25, 115-118 (2001).
L. Deck; “Multiple Surface Phase Shifting Interferometry”, Proc. SPIE, 4451, 424-430 (2001).
L. Deck and J.A. Soobitsky, “Phase-shifting via wavelength tuning in very large aperture interferometers,” Proc. SPIE, 3782-58, 432-442, 1999.
L. Deck; “Simultaneous Multiple Surface Measurements using Fourier-Transform Phase Shifting Interferometry, in: 4th International workshop on automatic processing of fringe patterns”, Fringe 2001, Elsevier, Paris, (2001), 230-236.
P. de Groot, “Chromatic dispersion effects in coherent absolute ranging,” Opt. Lett., vol. 17, pp. 898-900, 1992.
Peter de Groot, “Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window,” Applied Optics, vol. 34, p. 4723, 1995.
Peter de Groot, “Measurement of transparent plates with wavelength-tuned phase-shifting interferometry,” Applied Optics, vol. 39, No. 16, pp. 2658-2663, 2000.
Klaus Freischlad, “Fourier Analysis of Phase Shifting Algorithms,” Proc. SPIE vol. 3407, pp. 73-85, 1998.
K. Freischlad, “Large flat panel profiler,” Proc. SPIE 2862, pp. 163-171, 1996.
J.E.Greivenkamp and J.H.Bruning, “Phase shifting interferometry,” Optical Shop Testing, D. Malacara, pp. 501-598, J. Wiley, New York, 1992.
Susumu Kuwamaura and Ichirou Yamaguchi, “Wavelength scanning profilometry for real-time surface shape measurement,” Appl. Opt., 36, 4473-4482 (1997).
Okada et al., “Separate measurements of surface shapes and refractive index inhomogeniety of an optical element using tunable-source phase shifting interferometry,” Applied Optics, vol. 29, No. 22, pp. 3280-3285, 1990.
M. Suematsu and M. Takeda, “Wavelength-shift interferometry for distance measurements using Fourier transform technique for fringe analysis,” Applied Optics, vol. 30, No. 28, pp. 4046-4055, 1991.
Kinoshita M. et al., “Optical Frequency-Domain Imaging Microprofilometry with a Frequency-Tunable Liquid-Crystal Fabry-Perot Etalon Device”,Applied Optics, Optical Society of America, vol. 38, No. 34, Dec. 1, 1999, pp. 7063-7068.
L. Deck, “Absolute Distance Measurements Using FTPSI With a Widely Tunable IR Laser,” Proc. SPIE, 4778, 218-226 (2002).
P. de Groot, 101-Frame Algorithm for Phase Shifting Interferometry, SPIE, vol. 3098, pp. 283-292 (1997).
De Groot Peter J.
Deck Leslie L.
Fish & Richardson P.C.
Lyons Michael A.
Toatley , Jr. Gregory J.
Zygo Corporation
LandOfFree
Apparatus and method for mechanical phase shifting... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for mechanical phase shifting..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for mechanical phase shifting... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3539070