Apparatus and method for measuring thickness and composition...

X-ray or gamma ray systems or devices – Specific application – Fluorescence

Reexamination Certificate

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C378S046000, C378S071000

Reexamination Certificate

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06885727

ABSTRACT:
An apparatus determines the thickness and composition of a multi-layered sample comprised of at least a copper layer and a tin-copper alloy plating layer disposed on the copper layer. The sample is irradiated with primary X-rays and an energy-dispersive X-ray detector detects fluorescent X-rays and diffracted X-rays emitted from the sample. An X-ray spectrum of the detected fluorescent X-rays and diffracted X-rays is generated. The concentration of copper in the tin-copper alloy plating layer of the sample is determined utilizing peak intensities of the diffracted X-rays in the X-ray spectrum. The thickness of the tin-copper alloy plating layer of the sample is determined utilizing peak intensities of the fluorescent X-rays in the X-ray spectrum and the determined copper concentration.

REFERENCES:
patent: 4959848 (1990-09-01), Parobek
patent: 6038280 (2000-03-01), Rossiger et al.

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