Apparatus and method for measuring thermal conductivity

Thermal measuring and testing – Determination of inherent thermal property – Thermal conductivity

Reexamination Certificate

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C374S120000, C703S002000

Reexamination Certificate

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11103660

ABSTRACT:
An apparatus and method for measuring and mapping thermal conductivity and thermal diffusivity at micrometer scale resolution. The apparatus and method utilize a mode-locked femtosecond pulsed laser in a pump-probe configuration to analyze time-domain thermoreflectance of a specimen to evaluate its thermal conductivity in micro-scale, so that, if desired, an image of thermal conductivity distribution of micro-scale regions may be obtained therefrom. A multi-layer, complete three-dimensional model that takes into account the entire three-dimensional heat flow in cylindrical coordinates enables micro-scale measurements to be made at an accuracy of about 90% of well-accepted values.

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