Apparatus and method for measuring the length and width of a spo

Details Apparatus and method for measuring the length and width of a spo Apparatus and method for measuring the length and width of a spo

1994-12-21

1996-03-12

Gonzalez, Frank

Optics: measuring and testing

Lamp beam direction or pattern

356225, 356431, G01J 100, G01J 142, G01N 2184

Patent

active

054990947

ABSTRACT:
A scanning spot (54) moves over a pair of masks (50, 58) provided with respective arrays of transverse slits (52) of varying widths along the path of the spot or of transverse windows (60) at varying positions along a line (62) at an angle (.alpha.) to the path. Pulses of light passing through the slits and windows are detected (56.sub.W, 56.sub.L) and corresponding signals compared (102, 122) to predetermined values to produce digital pulses which are directed to counters (92, 94) to provide digital displays (126, 128) of spot width and length. Corresponding analog signals also may be provided (130-136).

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