Optics: measuring and testing – By polarized light examination – With birefringent element
Patent
1993-06-08
1996-01-16
Turner, Samuel A.
Optics: measuring and testing
By polarized light examination
With birefringent element
356359, G01B 902
Patent
active
054852757
ABSTRACT:
An apparatus for measuring a shape, such as a cylindrical shape, and an apparatus for measuring system errors of that apparatus are provided. When a cylindrical light wavefront is made incident on an object to be measured and the shape of the object to be measured is measured by utilizing the interference fringes produced on the basis of a difference between the cylindrical light wavefront and the surface shape of the object to be measured, measurement is conducted at least three times beforehand under different light wavefront incident conditions on the predetermined object to be measured, and the system errors of the entire apparatus are calculated using the interference fringe data obtained in these three measurement operations. The errors generated in subsequent measurement operations can be corrected using the obtained system errors.
REFERENCES:
patent: 5033855 (1991-07-01), Matsui
Truax, "Absolute Interferometric Testing of Spherical Surfaces," SPIE vol. 966 Advances in Fabrication and Metrology for Optics and Large Optics (1988), pp. 130-137.
Bruning, et al., "Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and Lenses," Applied Optics vol. 13, No. 11, Nov. 1974, pp. 2693-2703.
"Interferometry", McGraw-Hill Encyclopedia of Science & Technology, 6th Edition, 1980, pp. 229-234.
Canon Kabushiki Kaisha
Turner Samuel A.
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