Apparatus and method for measuring the depth of fine engraved pa

Details Apparatus and method for measuring the depth of fine engraved pa Apparatus and method for measuring the depth of fine engraved pa

1988-10-07

1990-11-06

McGraw, Vincent P.

Optics: measuring and testing

By polarized light examination

With light attenuation

356355, 356446, G01B 1122

Patent

active

RE0334243

ABSTRACT:
An apparatus and method for measuring in a non-contact manner the depth of pits and grooves formed by etching in periodic patterns on the surface of a substrate. The measurement is based on the detection of the intensity of a diffraction ray excluding that of the 0th order through the irradiation of a light beam with variable wave length to the sample. Whereas, the conventional measuring system is sensitive to a diffraction ray of the 0th order, i.e., the major component of the reflected light, that hampers the detection of a higher order diffraction ray carrying information of the depth.

REFERENCES:
patent: 4303341 (1981-12-01), Kleinknecht et al.
patent: 4498772 (1985-02-01), Jastrzebski et al.

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