Apparatus and method for measuring suspension and head...

Details Apparatus and method for measuring suspension and head... Apparatus and method for measuring suspension and head...

2006-12-06

2010-02-02

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Position or displacement

Position transverse to viewing axis

C356S614000

Reexamination Certificate

active

07656540

ABSTRACT:
An optical measurement device for determining at least two parameters of a measurement location of a surface of a workpiece positioned in a known coordinate system by a workpiece support is described. The device comprises a first light source providing a first measurement beam at a first wavelength and a second light source providing a second measurement beam at a second wavelength. The device also comprises a beam steering system positioning the first and second measurement beams to be collocated on the surface of the workpiece. Further, the device comprise a first imaging system, detecting the incoming position of the first measurement beam and an optical receiving system, detecting the incoming position of the second measurement beam.

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patent: 6421124 (2002-07-01), Matsumoto et al.
patent: 6542251 (2003-04-01), Mueller-Rentz
patent: 7027141 (2006-04-01), Girard et al.
patent: 2006/0072381 (2006-04-01), Girard

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