Apparatus and method for measuring pressures and indicating leak

Optics: measuring and testing – With plural diverse test or art

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

73 407, 73705, 250458, 356311, G01M 340

Patent

active

041474317

ABSTRACT:
A partial pressure gauge utilizes an efficient electron collision excitation source yielding de-excitation radiation characteristic of residual gases. The intensity of a given spectral line is proportional to the partial pressure of the gas having such spectral line, and the current drawn from the excitation source provides a measure of the total pressure. A calibration technique based upon comparing the emitted light intensity with the ion currents associated with the excitation process yields an accurate measure of the relative partial pressure. Use of a filter to selectively pass radiation from a known constituent in known proportion in ambient gas provides an indication of the presence of a leak without the need for probing with a test gas. Provision for passing an evaporant stream through the excitation region permits accurate monitoring of the evaporant flux from which depostion rate is determined. In combination with techniques for achieving high differential sensitivity to iluctuations in light output from a selected spectral line, a novel leak detector is achieved. In combination with an optically dispersive element a residual gas analyzer is obtained.

REFERENCES:
patent: 3398582 (1968-08-01), McFarland
patent: 3489498 (1970-01-01), Brody et al.
Lichtman, D., "The Use of Residual-Gas-Analysis Technique for Vacuum Process Control & Troubleshooting" , Jr. of Vacuum Science & Technology, vol. 8, #1, 1971, p. 309.
Marklund et al., "Residual Gas Analysis in a Vacuum Evaporator", Vacuum, vol. 16, #7, pp. 365-371.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus and method for measuring pressures and indicating leak does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for measuring pressures and indicating leak, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for measuring pressures and indicating leak will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1744569

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.