Optics: measuring and testing – With plural diverse test or art
Patent
1978-01-25
1979-04-03
Corbin, John K.
Optics: measuring and testing
With plural diverse test or art
73 407, 73705, 250458, 356311, G01M 340
Patent
active
041474317
ABSTRACT:
A partial pressure gauge utilizes an efficient electron collision excitation source yielding de-excitation radiation characteristic of residual gases. The intensity of a given spectral line is proportional to the partial pressure of the gas having such spectral line, and the current drawn from the excitation source provides a measure of the total pressure. A calibration technique based upon comparing the emitted light intensity with the ion currents associated with the excitation process yields an accurate measure of the relative partial pressure. Use of a filter to selectively pass radiation from a known constituent in known proportion in ambient gas provides an indication of the presence of a leak without the need for probing with a test gas. Provision for passing an evaporant stream through the excitation region permits accurate monitoring of the evaporant flux from which depostion rate is determined. In combination with techniques for achieving high differential sensitivity to iluctuations in light output from a selected spectral line, a novel leak detector is achieved. In combination with an optically dispersive element a residual gas analyzer is obtained.
REFERENCES:
patent: 3398582 (1968-08-01), McFarland
patent: 3489498 (1970-01-01), Brody et al.
Lichtman, D., "The Use of Residual-Gas-Analysis Technique for Vacuum Process Control & Troubleshooting" , Jr. of Vacuum Science & Technology, vol. 8, #1, 1971, p. 309.
Marklund et al., "Residual Gas Analysis in a Vacuum Evaporator", Vacuum, vol. 16, #7, pp. 365-371.
Berkowitz Edward H.
Cole Stanley Z.
Corbin John K.
Herbert Leon F.
Punter Wm. H.
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