Optics: measuring and testing – By light interference
Reexamination Certificate
2006-06-20
2006-06-20
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
Reexamination Certificate
active
07064838
ABSTRACT:
An interferometry system including an interferometer that includes a source imaging system that focuses an input beam onto a spot on or in the object and an object imaging system that images the spot onto a detector element as an interference beam, wherein the source imaging system is characterized by a first aperture stop that defines a first aperture and includes a first phase shifter that introduces a first phase shift in light passing through a first region of the first aperture relative to light passing through a second region of the first aperture, and wherein the object imaging system is characterized by a second aperture stop that defines a second aperture and includes a second phase shifter that introduces a second phase shift in light passing through a first region of the second aperture relative to light passing through a second region of the second aperture.
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Wilmer Cutler Pickering Hale and Dorr LLP
Zetetic Institute
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