Apparatus and method for mass flow controller with a...

Details Apparatus and method for mass flow controller with a... Apparatus and method for mass flow controller with a...

2005-03-22

2005-03-22

Scherbel, David A. (Department: 3753)

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

C137S486000, C700S002000, C700S282000, C702S100000

Reexamination Certificate

active

06868862

ABSTRACT:
A mass flow controller includes an electronic controller for which a plurality of closed loop control codes sets may be uploaded. In a dual processor embodiment, one processor may upload a plurality of codes sets for another, with the selection of codes sets determined by the uploading processor either autonomously or through user interaction.

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