Apparatus and method for manufacturing semiconductors

Details Apparatus and method for manufacturing semiconductors Apparatus and method for manufacturing semiconductors

1994-10-31

1996-11-26

Metjahic, Safet

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378 34, 188267, G03B 2742

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055790844

ABSTRACT:
A semiconductor manufacturing apparatus having a vibration insulation apparatus with a damper for insulating floor vibrations is so designed that damping characteristics of a damper can be changed. Thus, a semiconductor manufacturing apparatus capable of preventing floor vibrations from being transmitted to the apparatus and efficiently attenuating vibrations generated by the apparatus can be provided.

REFERENCES:
patent: 3807078 (1974-04-01), Karnopp et al.
patent: 4516253 (1985-05-01), Novak
patent: 4969624 (1990-11-01), Ustelentsev et al.
patent: 5100166 (1992-03-01), Mitsui
patent: 5187519 (1993-02-01), Takabayashi et al.

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