Semiconductor device manufacturing: process – Including control responsive to sensed condition
Patent
1998-03-04
2000-10-24
Dang, Thi
Semiconductor device manufacturing: process
Including control responsive to sensed condition
438 14, H01L 2100
Patent
active
061366145
ABSTRACT:
The present invention is directed to a control system for a photolithographic integrated circuit manufacturing process. The control system incorporates a visual gating device in which a series of nests are provided. A barcode reader may be provided in conjunction with some of the nests. In operation, a human operator advances wafer lot boxes through the nest positions in accordance with a series of displays which are controlled by the control system. The barcode reader associated with each nest reads a barcode label on the wafer lot box contained within the nest to determine the lot number corresponding to the lot box. This lot number is then used by the control system to obtain setup parameters for the various photolithographic manufacturing process operations.
REFERENCES:
patent: 4636634 (1987-01-01), Harper et al.
patent: 4833306 (1989-05-01), Milbrett
patent: 5314564 (1994-05-01), Kobayashi
patent: 5567927 (1996-10-01), Kahn et al.
patent: 5814829 (1998-09-01), Broude et al.
patent: 5933220 (1999-08-01), Park
patent: 5953579 (1999-09-01), Lee et al.
Agilent Technologies
Dang Thi
LandOfFree
Apparatus and method for manufacturing integrated circuit device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for manufacturing integrated circuit device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for manufacturing integrated circuit device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1962542