Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-11-26
2011-10-11
Glick, Edward (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S077000
Reexamination Certificate
active
08035795
ABSTRACT:
An apparatus and method maintain immersion fluid in the gap adjacent to the projection lens during the exchange of a work piece in a lithography machine. The apparatus and method include an optical assembly that projects an image onto a work piece and a stage assembly including a work piece table that supports the work piece adjacent to the optical assembly. An environmental system is provided to supply and remove an immersion fluid from the gap between the optical assembly and the work piece on the stage assembly. After exposure of the work piece is complete, an exchange system removes the work piece and replaces it with a second work piece. An immersion fluid containment system maintains the immersion liquid in the gap during removal of the first work piece and replacement with the second work piece.
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Glick Edward
Kreutzer Colin
Nikon Corporation
Oliff & Berridg,e PLC
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