Apparatus and method for maintaining immersion fluid in the...

Details Apparatus and method for maintaining immersion fluid in the... Apparatus and method for maintaining immersion fluid in the...

2007-05-11

2009-06-09

Mathews, Alan A (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S072000

Reexamination Certificate

active

07545479

ABSTRACT:
A lithographic projection apparatus includes a substrate table configured to hold a substrate, a projection system configured to project a patterned beam onto a target portion of the substrate, liquid being provided to a space between the projection system and the substrate, and a shutter configured to isolate the space from the substrate or a space to be occupied by a substrate. The shutter is separable from the remainder of the apparatus.

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