Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-06-14
2011-06-14
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S077000
Reexamination Certificate
active
07961290
ABSTRACT:
An apparatus and method maintain immersion fluid in the gap adjacent to the projection lens during the exchange of a work piece in a lithography machine. The apparatus and method include an optical assembly that projects an image onto a work piece and a stage assembly including a work piece table that supports the work piece adjacent to the optical assembly. An environmental system is provided to supply and remove an immersion fluid from the gap between the optical assembly and the work piece on the stage assembly. After exposure of the work piece is complete, an exchange system removes the work piece and replaces it with a second work piece. An immersion fluid containment system maintains the immersion liquid in the gap during removal of the first work piece and replacement with the second work piece.
REFERENCES:
patent: 3648587 (1972-03-01), Stevens
patent: 4026653 (1977-05-01), Appelbaum et al.
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4465368 (1984-08-01), Matsuura et al.
patent: 4480910 (1984-11-01), Takanashi et al.
patent: 4509852 (1985-04-01), Tabarelli et al.
patent: 4650983 (1987-03-01), Suwa
patent: 4780617 (1988-10-01), Umatate et al.
patent: RE32795 (1988-12-01), Matsuura et al.
patent: 5121256 (1992-06-01), Corle et al.
patent: 5243195 (1993-09-01), Nishi
patent: 5448332 (1995-09-01), Sakakibara et al.
patent: 5528100 (1996-06-01), Igeta et al.
patent: 5528118 (1996-06-01), Lee
patent: 5534970 (1996-07-01), Nakashima et al.
patent: 5610683 (1997-03-01), Takahashi
patent: 5611452 (1997-03-01), Bonora et al.
patent: 5623853 (1997-04-01), Novak et al.
patent: 5636066 (1997-06-01), Takahashi
patent: 5646413 (1997-07-01), Nishi
patent: 5650840 (1997-07-01), Taniguchi
patent: 5668672 (1997-09-01), Oomura
patent: 5689377 (1997-11-01), Takahashi
patent: 5691802 (1997-11-01), Takahashi
patent: 5693439 (1997-12-01), Tanaka et al.
patent: 5715039 (1998-02-01), Fukuda et al.
patent: 5744924 (1998-04-01), Lee
patent: 5805334 (1998-09-01), Takahashi
patent: 5815246 (1998-09-01), Sperling et al.
patent: 5825043 (1998-10-01), Suwa
patent: 5835275 (1998-11-01), Takahashi et al.
patent: 5844247 (1998-12-01), Nishi
patent: 5861997 (1999-01-01), Takahashi
patent: 5874820 (1999-02-01), Lee
patent: 5900354 (1999-05-01), Batchelder
patent: 5942871 (1999-08-01), Lee
patent: 5964441 (1999-10-01), Gauger et al.
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 5982128 (1999-11-01), Lee
patent: 5999333 (1999-12-01), Takahashi
patent: 6008500 (1999-12-01), Lee
patent: 6020710 (2000-02-01), Lee
patent: 6049186 (2000-04-01), Lee
patent: 6051843 (2000-04-01), Nishi
patent: RE36730 (2000-06-01), Nishi
patent: 6087797 (2000-07-01), Lee
patent: 6137561 (2000-10-01), Imai
patent: 6150787 (2000-11-01), Lee
patent: 6151105 (2000-11-01), Lee
patent: 6175404 (2001-01-01), Lee
patent: 6188195 (2001-02-01), Lee
patent: 6208407 (2001-03-01), Loopstra
patent: 6246202 (2001-06-01), Lee
patent: 6262796 (2001-07-01), Loopstra et al.
patent: RE37309 (2001-08-01), Nakashima et al.
patent: 6271640 (2001-08-01), Lee
patent: 6279881 (2001-08-01), Nishi
patent: 6281654 (2001-08-01), Lee
patent: 6316901 (2001-11-01), Lee
patent: 6331885 (2001-12-01), Nishi
patent: 6341007 (2002-01-01), Nishi et al.
patent: 6400441 (2002-06-01), Nishi et al.
patent: 6417914 (2002-07-01), Li
patent: 6426790 (2002-07-01), Hayashi
patent: 6433872 (2002-08-01), Nishi et al.
patent: 6445441 (2002-09-01), Mouri
patent: 6449030 (2002-09-01), Kwan
patent: 6496257 (2002-12-01), Taniguchi et al.
patent: 6498352 (2002-12-01), Nishi
patent: 6549269 (2003-04-01), Nishi et al.
patent: 6590634 (2003-07-01), Nishi et al.
patent: 6608681 (2003-08-01), Tanaka et al.
patent: 6665054 (2003-12-01), Inoue
patent: 6683433 (2004-01-01), Lee
patent: RE38421 (2004-02-01), Takahashi
patent: RE38438 (2004-02-01), Takahashi
patent: 6747732 (2004-06-01), Lee
patent: 6771350 (2004-08-01), Nishinaga
patent: 6788385 (2004-09-01), Tanaka et al.
patent: 6788477 (2004-09-01), Lin
patent: 6798491 (2004-09-01), Nishi et al.
patent: 6841965 (2005-01-01), Lee
patent: 6842221 (2005-01-01), Shiraishi
patent: 6853443 (2005-02-01), Nishi
patent: 6867844 (2005-03-01), Vogel et al.
patent: 6878916 (2005-04-01), Schuster
patent: 6891596 (2005-05-01), Rostalski et al.
patent: 6891683 (2005-05-01), Schuster
patent: 6897963 (2005-05-01), Taniguchi et al.
patent: 6906782 (2005-06-01), Nishi
patent: 6927836 (2005-08-01), Nishinaga
patent: 6927840 (2005-08-01), Lee
patent: 6952253 (2005-10-01), Lof et al.
patent: 6954256 (2005-10-01), Flagello et al.
patent: 6989647 (2006-01-01), Lee
patent: RE39024 (2006-03-01), Takahashi
patent: 7009682 (2006-03-01), Bleeker
patent: 7038760 (2006-05-01), Mulkens et al.
patent: 7057702 (2006-06-01), Lof et al.
patent: 7075616 (2006-07-01), Derksen et al.
patent: 7081943 (2006-07-01), Lof et al.
patent: 7092069 (2006-08-01), Schuster
patent: 7098991 (2006-08-01), Nagasaka et al.
patent: RE39296 (2006-09-01), Takahashi
patent: 7110081 (2006-09-01), Hoogendam et al.
patent: 7119874 (2006-10-01), Cox et al.
patent: 7119876 (2006-10-01), Van Der Toorn et al.
patent: 7119881 (2006-10-01), Bleeker
patent: 7154676 (2006-12-01), Schuster
patent: 7161659 (2007-01-01), Van Den Brink et al.
patent: 7177008 (2007-02-01), Nishi et al.
patent: 7190527 (2007-03-01), Rostalski et al.
patent: 7193232 (2007-03-01), Lof et al.
patent: 7199858 (2007-04-01), Lof et al.
patent: 7203008 (2007-04-01), Schuster
patent: 7213963 (2007-05-01), Lof et al.
patent: 7224436 (2007-05-01), Derksen et al.
patent: 7256869 (2007-08-01), Nishi
patent: 7312847 (2007-12-01), Rostalski et al.
patent: 7321419 (2008-01-01), Ebihara
patent: RE40043 (2008-02-01), Kwan et al.
patent: 7327435 (2008-02-01), Binnard
patent: 7339743 (2008-03-01), Schuster
patent: 7352434 (2008-04-01), Streefkerk et al.
patent: 7365513 (2008-04-01), Lee
patent: 7372538 (2008-05-01), Binnard
patent: 7372541 (2008-05-01), Lof et al.
patent: 7379158 (2008-05-01), Mizutani et al.
patent: 7382540 (2008-06-01), Rostalski et al.
patent: 7388648 (2008-06-01), Lof et al.
patent: 7394521 (2008-07-01), Van Santen et al.
patent: 7399978 (2008-07-01), Van Santen et al.
patent: 7436486 (2008-10-01), Hirukawa
patent: 7436487 (2008-10-01), Mizutani et al.
patent: 7442908 (2008-10-01), Schuster
patent: 7446851 (2008-11-01), Hirukawa
patent: 7456929 (2008-11-01), Shibuta
patent: 7460207 (2008-12-01), Mizutani et al.
patent: 7482611 (2009-01-01), Lof et al.
patent: 7486385 (2009-02-01), Ebihara
patent: 7495840 (2009-02-01), Schuster
patent: 7505111 (2009-03-01), Hirukawa et al.
patent: 7514699 (2009-04-01), Neijzen et al.
patent: 7528931 (2009-05-01), Modderman
patent: 7545479 (2009-06-01), Binnard
patent: 7589821 (2009-09-01), Hirukawa
patent: 7589822 (2009-09-01), Shibazaki
patent: 7593092 (2009-09-01), Lof et al.
patent: 7593093 (2009-09-01), Lof et al.
patent: 7639343 (2009-12-01), Hirukawa
patent: 2001/0019250 (2001-09-01), Lee
patent: 2001/0030522 (2001-10-01), Lee
patent: 2002/0017889 (2002-02-01), Lee
patent: 2002/0018192 (2002-02-01), Nishi
patent: 2002/0020821 (2002-02-01), Van Santen et al.
patent: 2002/0041377 (2002-04-01), Hagiwara et al.
patent: 2002/0061469 (2002-05-01), Tanaka
patent: 2002/0163629 (2002-11-01), Switkes et al.
patent: 2002/0176082 (2002-11-01), Sakakibara et al.
patent: 2002/0196421 (2002-12-01), Tanaka et al.
patent: 2003/0025890 (2003-02-01), Nishinaga
patent: 2003/0030916 (2003-02-01), Suenaga
patent: 2003/0075871 (2003-04-01), Shinozaki
patent: 2003/0117596 (2003-06-01), Nishi
patent: 2003/0128348 (2003-07-01), Nishi
patent: 2003/0174408 (2003-09-01), Rostalski et al.
patent: 2004/0000627 (2004-01-01), Schuster
patent: 2004/0004757 (2004-01-01), Schuster
patent: 2004/0032575 (2004-02-01), Nishi et al.
patent: 2004/0075895 (2004-04-01), Lin
patent: 2004/0095085 (2004-05-01), Lee
patent: 2004/0109237 (2004-06-01), Epple et al.
patent: 2004/0114117 (2004-06-01), Bleeker
patent: 2004/0118184 (2004-06-01), Violette
patent: 2004/0119954 (2004-06-01), Kawashima et al.
patent: 2004/0120051 (2004-06-01), Schuster
patent: 2004/0125351 (2004-07-01), Krautschik
patent: 2004/0136494 (2004-07-01),
Glick Edward J
Kreutzer Colin
Nikon Corporation
Oliff & Berridg,e PLC
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