Apparatus and method for light spectrum measurement

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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G01J 328

Patent

active

060024798

ABSTRACT:
An apparatus and method for in situ spectral measurement is disclosed. The apparatus uses a low-resolution grating to disperse light and thereby image a spectrum thereof. The imaged spectrum is converted into a digital electrical signal and is processed in order to enhance the spectral information. The resulting spectral information is analogous to that captured using a higher resolution spectral imager with optical processing of the spectral data.

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patent: 5657404 (1997-08-01), Buchanan et al.
patent: 5712710 (1998-01-01), Karakus et al.
patent: 5731874 (1998-03-01), Maluf

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