Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements
Patent
1999-04-14
2000-12-05
Ben, Loha
Optical: systems and elements
Single channel simultaneously to or from plural channels
By surface composed of lenticular elements
359619, 359621, G02B 2710
Patent
active
061574929
ABSTRACT:
There is provided an improvement on homogeneity of annealing performed utilizing radiation of a laser beam on a silicon film having a large area. In a configuration wherein a linear laser beam is applied to a surface to be irradiated, optimization is carried out on the width and number of cylindrical lenses forming homogenizers 103 and 104 for controlling the distribution of radiation energy density in the longitudinal direction of the linear beam. For example, the width of the cylindrical lenses forming the homogenizers 103 and 104 is set in the range from 0.1 mm to 5 mm, and the number of the lenses is chosen such that one lens is provided for every 5 mm-15 mm along the length of the linear laser beam in the longitudinal direction thereof. This makes it possible to improve homogeneity of the radiation energy density of the linear laser in the longitudinal direction thereof.
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Kusumoto Naoto
Tanaka Koichiro
Teramoto Satoshi
Yamazaki Shunpei
Ben Loha
Semiconductor Energy Laboratory Co,. Ltd.
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