Optics: measuring and testing – By light interference
Reexamination Certificate
2006-08-29
2006-08-29
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
C356S484000, C356S491000
Reexamination Certificate
active
07099014
ABSTRACT:
A method of making interferometric measurements of an object, the method including: generating an input beam that includes a plurality of component beams, each of which is at a different frequency and all of which are spatially coextensive with each other, some of the components beams having a first polarization and the rest having a second polarization that is orthogonal to the first polarization; deriving a plurality of measurement beams from the plurality of component beams, each of the plurality of measurement beams being at the frequency of the component beam from which it is derived; focusing the plurality of measurement beams onto a selected spot to produce a plurality of return measurement beams; combining each of the return measurement beams of the plurality of return measurement beams with a different corresponding reference beam of a plurality of reference beams to produce a plurality of interference beams; and acquiring a plurality of electrical interference signal values for the selected spot from the plurality of interference beams.
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Lyons Michael A.
Toatley , Jr. Gregory J.
Wilmer Cutler Pickering Hale and Dorr LLP
Zetetic Institute
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