Apparatus and method for irradiating energy beam

Details Apparatus and method for irradiating energy beam Apparatus and method for irradiating energy beam

2006-05-10

2010-12-28

Nguyen, Kiet T (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

Reexamination Certificate

active

07858954

ABSTRACT:
An energy beam irradiating apparatus and/or method which, when peeling off an adhesive sheet having an energy radiation curable adhesive and stuck to a wafer, has an ultraviolet ray irradiated to the adhesive sheet, and on an occasion of reducing its adhesive strength. The wafer with the adhesive sheet is suction-held with a supporting member, and the ultraviolet ray is irradiated from an UV lamp in this state. On this occasion, a nitrogen gas N is ejected from a gas discharge area adjacent to a wafer suction-holding area of the supporting member.

REFERENCES:
patent: 4347300 (1982-08-01), Shimazu et al.
patent: 7691925 (2010-04-01), Amano et al.
patent: 2004 281430 (2004-10-01), None

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