Apparatus and method for investigation of a surface

Details Apparatus and method for investigation of a surface Apparatus and method for investigation of a surface

1983-05-16

1986-03-18

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, G01B 902

Patent

active

045764794

ABSTRACT:
A microscope used to investigate the profile of a surface (28) comprises a laser light source (10) from which a beam of radiation passes through a collimator (12) and polarizer (16). Orthogonally polarized components are focused at different positions by a birefringent lens system (22,260). Light reflected by the surface is passed to a photodetector (36) which passes an output signal to an analyzer circuit (not shown).

REFERENCES:
patent: 3958884 (1976-05-01), Smith
patent: 4353650 (1982-10-01), Sommargren
Reiter, "Polarisations Interferometer zur Autzeichnuug von Kleinen, Schnellen Winkel-und Relativbewegungen", Frequenze, vol. 29, No. 3, pp. 88-91, 1975.

Affiliated with

Also associated with

Rating

Apparatus and method for investigation of a surface does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for investigation of a surface, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for investigation of a surface will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2302877