Apparatus and method for investigating a sample

Details Apparatus and method for investigating a sample Apparatus and method for investigating a sample

2007-05-08

2007-05-08

Hannaher, Constantine (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C250S341800, C250S585000

Reexamination Certificate

active

10466398

ABSTRACT:
An apparatus for investigating a sample comprising a source of a beam of radiation, a detector for detecting a beam of radiation reflected by or transmitted through a sample to be imaged, an optical subsystem for manipulating the beam between the source and detector and means for translating the optical subsystem along a first translation axis relative to the source and detector to scan the beam across the sample, wherein the source and the detector are on opposite sides of the subsystem and the beam from the source and the beam reflected or transmitted each enter and exit the subsystem in a direction parallel to the first direction of translation. The apparatus is also suitable for maintaining the relative phase of two beams of radiation, during translation of an optical subsystem.

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