Apparatus and method for interferometric measurements

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356364, G01B 902

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active

059108401

ABSTRACT:
A light source supplies light to an interferometer or polarimetric sensor and a beam divider divides the emerging light into two or more beam paths. Interference filters having different central wavelengths are provided in the beam paths and can be used to bring the two uncoupled interference signals into quadrature, e.g. by suitable adjustment of the tilting angle. In each beam path, a measuring device for quantitatively measuring the received light is disposed, and the data from the measuring devices are supplied to a data-processing device.

REFERENCES:
patent: 4708475 (1987-11-01), Watson
patent: 5223911 (1993-06-01), Suchoski, Jr. et al.
patent: 5675415 (1997-10-01), Akatsu et al.
Katherine Creath, Appl. Optics 26, 2810 (1987).
Peter de Groot and Stanley Kishner, Appl. Optics 30, 4026 (1991).
D.A. Jackson, Meas. Sci. Technol. 5, 621 (1994).

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