Boots – shoes – and leggings
Patent
1992-04-21
1996-12-17
Ramirez, Ellis B.
Boots, shoes, and leggings
382141, 382148, 382151, G06K 968
Patent
active
055860583
ABSTRACT:
The present invention seeks to provide an improved system for inspection of and detection of defects in objects such as reticles, photomasks, semiconductor wafers, flat panel displays and other patterned objects. Preferably, the system has two or more stages, whereby the object is examined separately for fine defects, preferably by inspecting a binary level representation of the object, and for ultra fine defects, preferably by inspecting a gray level representation of the object. The system also preferably includes reinspection apparatus for reinspection of detected defects, thereby to reduce the false alarm rate, and for classifying the remaining defects by size, area and type.
REFERENCES:
patent: 4247203 (1981-01-01), Levy et al.
patent: 4347001 (1982-08-01), Levy et al.
patent: 4481664 (1984-11-01), Linger et al.
patent: 4532650 (1985-07-01), Wihl et al.
patent: 4579455 (1986-04-01), Levy et al.
patent: 4628531 (1986-12-01), Okamoto et al.
patent: 4633504 (1986-12-01), Wihl et al.
patent: 4731855 (1988-03-01), Suda et al.
patent: 4764969 (1988-08-01), Ohtombe et al.
patent: 4794647 (1988-12-01), Forgues et al.
patent: 4805123 (1989-02-01), Specht et al.
patent: 4926489 (1990-05-01), Danielson et al.
patent: 5163128 (1992-11-01), Straayer
patent: 5325443 (1994-06-01), Beatty et al.
A. Rosenfeld, et al., "Digital Picture Processing", vol. 1, Academic Press, 1982, pp. 36-49.
A. Rosenfeld, et al., "Digital Picture Processing", vol. 1, Academic Press, 1982, pp. 215-217.
Detection and Sub-Piscel Location of Objects in Digitized Aerial Imagery -Mark L. Akey & O. R. Mitchell -Purdue University -(no date).
A Computational Approach To Edge Education John Canny -vol. Pami-8, No. 6, Nov. 1986.
Using Stereo Vision Analysis To Recognize Partially Obscured Objects, Li Jin-Cheng & Yuan Bao-Zung -Beijing China -1988 IEEE.
A Line Extraction Method For Automated Sem Inspection of VLSI Resist -Transactions on Pattern Analysis And Machine Intelligence-shu et al. -vol. 10, No. 1, Jan. 1988.
Locating Industrial Parts With Subpixel Accuracies, Richard A. Young -MI -USA SPIE vol. 728 Optics, Illumination And Image for Machine Vision -1986.
A. Rosenfeld et al, "Digital Picture Processing", vol. 1, Academic Press, 1982, pp. 255 to 304.
Alon Amir
Aloni Meir
Eran Yair
Katz Itzhak
Katzir Yigal
Orbot Instruments Ltd.
Pipala Edward
Ramirez Ellis B.
LandOfFree
Apparatus and method for inspection of a patterned object by com does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for inspection of a patterned object by com, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for inspection of a patterned object by com will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1997486