Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1987-09-08
1988-08-02
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 73R, 371 20, 371 25, G01R 3128
Patent
active
047616075
ABSTRACT:
A semiconductor device inspecting apparatus includes a signal input for an LSI device, a comparator used to compare an LSI device output with an expected value, an X-Y stage for moving the LSI device in an X direction or a Y direction, a probe for non-contact probing of the electrical state inside the LSI device, and a device for determining the probing position and for judging and executing the result, by which the defect location of the LSI device is automatically located. A corresponding semiconductor device inspecting method includes a step of applying a test pattern to an input terminal of an LSI device, a step of comparing an output signal appearing at the output terminal of the semiconductor device with an expected value signal to detect conformity or nonconformity of the output signal and the expected value signal, a step of probing, in the case of nonconformity, of a specific portion of the semiconductor device by controlling a non-contact probe by using an error signal appearing at the output terminal; and a step of comparing this probing data with an expected value of the probed portion to locate the defect location in the semiconductor device.
REFERENCES:
patent: 4168796 (1979-09-01), Fulks et al.
patent: 4169244 (1979-09-01), Plows
patent: 4335457 (1982-06-01), Early
patent: 4588950 (1986-05-01), Henley
Noyori Masaharu
Shiragasawa Tsuyoshi
Sugano Masahide
Karlsen Ernest F.
Matsushita Electric - Industrial Co., Ltd.
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