Apparatus and method for inspecting semiconductor device

Details Apparatus and method for inspecting semiconductor device Apparatus and method for inspecting semiconductor device

2006-06-20

2006-06-20

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C700S108000, C700S109000, C700S110000, C700S111000

Reexamination Certificate

active

07065460

ABSTRACT:
An image of the shape of a semiconductor wafer is displayed on a display apparatus for displaying an inspection result of a semiconductor device, and a different color or pattern is displayed for each inspection result as display information indicating the inspection result of a semiconductor device in a region corresponding to the semiconductor device on the image of the semiconductor wafer.

REFERENCES:
patent: 6911350 (2005-06-01), Tsidilkovski et al.
patent: 2004/0057611 (2004-03-01), Lee et al.
patent: 2004/0175943 (2004-09-01), Waksman
patent: 11-8327 (1999-01-01), None
patent: 11-26333 (1999-01-01), None
patent: 11-67853 (1999-03-01), None
patent: 2000-306395 (2000-11-01), None
patent: 2002-39801 (2002-02-01), None
patent: 2002-237506 (2002-08-01), None

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