Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2007-09-04
2007-09-04
Chawan, Sheela (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S147000, C382S168000, C348S128000, C356S237200
Reexamination Certificate
active
10434105
ABSTRACT:
An inspection apparatus (1) has an image pickup part (2) for performing an image pickup of a substrate (9), an operation part (4) to which an image signal is inputted from said image pickup part (2) and a computer (5), and the operation part (4) specifies an inspection image and a reference image from an object image acquired by the image pickup part (2). In the operation part (4), a region class to which each pixel of the specified inspection image belongs is specified on the basis of a corresponding pixel value of the reference image. In a comparator circuit of the operation part (4), a differential absolute value between each pixel of the inspection image and a corresponding pixel of the reference image is calculated and the differential absolute value is compared with a defect check threshold value in accordance with the specified region class, to perform defect check. The inspection apparatus (1) can thereby appropriately detect a defect in accordance with the region class to which each pixel belongs.
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Japanese Office Action issued in corresponding Japanese Patent Application No. JP 2002-168054, dated Feb. 21, 2007.
Asai Hiroshi
Hikida Yuichiro
Onishi Hiroyuki
Chawan Sheela
Dainippon Screen Mfg. Co,. Ltd.
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