Apparatus and method for inspecting IC leads

Details Apparatus and method for inspecting IC leads Apparatus and method for inspecting IC leads

1990-12-20

1992-11-10

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356398, 250561, G01N 2100, G01N 2186

Patent

active

051628660

ABSTRACT:
An IC lead inspecting apparatus and a method of using such apparatus to measure any pitch deviation or coplanarity error of each IC lead. The apparatus comprises at least a displacement sensor for irradiating inspection light onto both an IC setting table and leads of an IC placed on the table so as to be inspected, and detecting the reflected light therefrom to measure the heights of the leads; and scanning means for moving the displacement sensor and the IC setting table relative to each other and scanning the lead array of the IC by the inspection light, wherein reference marks are formed on a scanning line of the inspection light on the IC setting table, and a surface portion of the table is composed of a transparent material. The pitch deviation of each lead is measured on the basis of a timing change in the output signal of the displacement sensor. And the upward or downward coplanarity error of each lead is measured from a level change in the output signal of the sensor.

REFERENCES:
patent: 4379175 (1988-04-01), Tamura
patent: 4598998 (1986-07-01), Kamei et al.
patent: 4765744 (1988-08-01), Kobayashi

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