Apparatus and method for inspecting film defect

Optics: measuring and testing – By polarized light examination

Reexamination Certificate

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Reexamination Certificate

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07428049

ABSTRACT:
First and second polarizing plates are placed to be crossed nicols across a film to be inspected. A light source projects light toward the film through the first polarizing plate. Alight receiver receives the light transmitted through the film and the second polarizing plate. When θ1represents an angle formed between an optical axis of the light receiver and a normal line that is perpendicular to the film surface, and θ2represents a rotational angle formed between the optical axis and a reference line that is orthogonal to a slow axis of the film, the light receiver is positioned to satisfy the following conditions:15°≦θ1≦35°, 20°≦θ2≦60°.

REFERENCES:
patent: 2001/0021016 (2001-09-01), Shimoda
patent: 6-235624 (1994-08-01), None
patent: 8-54351 (1996-02-01), None
patent: 9-73081 (1997-03-01), None
patent: 11-30591 (1999-02-01), None
patent: 2001-324453 (2001-11-01), None

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