Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2008-01-01
2008-01-01
Stafira, Michael P. (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237400, C356S237500
Reexamination Certificate
active
07315366
ABSTRACT:
A defect-inspecting apparatus including an arrangement to convert detected light into a first signal corresponding to light illuminated by a high-angle illumination optical system and/or a second signal corresponding to light illuminated by a low-angle illumination optical system; and a classification unit which utilizes the first and second signal and classifies defects on the object to be inspected, wherein a defect size is estimated by changing a correction coefficient of the defect size on a basis of a concave-convex level (b/a), where the concavo-convex level (b/a) of a defect is indicated by a ratio of a size b of a first direction of the defect to a size a of a second direction of the defect, where the second direction is lateral to the first direction.
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Hamamatsu Akira
Nishiyama Hidetoshi
Noguchi Minori
Ooshima Yoshimasa
Watanabe Tetsuya
Antonelli, Terry Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Stafira Michael P.
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