Apparatus and method for inspecting defects

Details Apparatus and method for inspecting defects Apparatus and method for inspecting defects

2011-07-05

2011-07-05

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100, C356S237500, C250S559450

Reexamination Certificate

active

07973920

ABSTRACT:
A defect inspection apparatus includes a movable stage for mounting a substrate having circuit patterns as an object of inspection, an irradiation optical system which irradiates a slit-shaped light beam from an oblique direction to the circuit patterns of the substrate, a detection optical system which includes an image sensor for receiving reflected/scattered light from the substrate by irradiation of the slit-shaped light beam and converting the received light into a signal, and an image processor which processes the signal. The irradiation optical system includes a cylindrical lens and a coherency reduction optical system, which receives the light beam and emits a plurality of slit-shaped light sub-beams which are spatially reduced in coherency in a light-converging direction of the cylindrical lens. The cylindrical lens focuses the plurality of slit-shaped light sub-beams into the slit-shaped light beam irradiated to the surface of the substrate.

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U.S. Appl. No. 12/827,470, filed Jun. 30, 2010, Nakano.
U.S. Appl. No. 12/029,660, filed Feb. 12, 2008, Nakano.

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