Apparatus and method for inspecting and cleaning...

Details Apparatus and method for inspecting and cleaning... Apparatus and method for inspecting and cleaning...

2006-11-28

2006-11-28

Kornakov, M. (Department: 1746)

Brushing, scrubbing, and general cleaning

Machines

With air blast or suction

C015S300100, C015S320000, C015S327100, C015S345000, C134S137000, C134S149000, C134S157000, C134S902000, C156S345510, C156S345540, C156S345550

Reexamination Certificate

active

07140066

ABSTRACT:
A semiconductor device is inspected and cleaned by applying a vacuum to the area in which the semiconductor device is positioned. Micro-sized particulates that are brushed off the semiconductor device during cleaning are drawn off by the vacuum.

REFERENCES:
patent: 5806138 (1998-09-01), Kawasaki
patent: 5967156 (1999-10-01), Rose et al.
patent: 6767429 (2004-07-01), Amano
patent: 5-104431 (1993-04-01), None

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