Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2007-10-30
2007-10-30
Mariam, Daniel (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
Reexamination Certificate
active
10661633
ABSTRACT:
An automated and integrated substrate inspecting apparatus for performing an EBR/EEW inspection, a defect inspection of patterns and reticle error inspection of a substrate includes a first stage for supporting a substrate; a first image acquisition unit for acquiring a first image of a peripheral portion of the substrate supported by the first stage; a second stage for supporting the substrate; a second image acquisition unit for acquiring a second image of the substrate supported by the second stage; a transfer robot for transferring the substrate between the first stage and the second stage; and a data processing unit, connected to the first image acquisition unit and the second image acquisition unit, for inspecting results of an edge bead removal process and an edge exposure process performed on the substrate using the first image, and for inspecting for defects of patterns formed on the substrate using the second image.
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Choi Jeong-Hyun
Choi Sun-Yong
Jun Chung-Sam
Kim Joo-Woo
Kim Kwang-Soo
Lee & Morse P.C.
Mariam Daniel
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