Apparatus and method for inspecting a reticle for color centers

Details Apparatus and method for inspecting a reticle for color centers Apparatus and method for inspecting a reticle for color centers

1994-09-02

1996-12-03

Fields, Carolyn E.

Radiant energy

Luminophor irradiation

With ultraviolet source

2504581, 2504591, G01N 2164

Patent

active

055810896

ABSTRACT:
A reticle is inspected for color center defects by using excimer laser used for pattern transfer to a wafer to cause fluoresence of the color centers.

REFERENCES:
patent: 4450358 (1984-05-01), Reynolds
patent: 4541715 (1985-09-01), Akiyama et al.
patent: 4716441 (1987-12-01), Ogawa
patent: 4744663 (1988-05-01), Hamashima et al.
patent: 5399867 (1995-03-01), Kohno

Affiliated with

Also associated with

Rating

Apparatus and method for inspecting a reticle for color centers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for inspecting a reticle for color centers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for inspecting a reticle for color centers will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-787348