Apparatus and method for inspecting a patterned part of a...

Details Apparatus and method for inspecting a patterned part of a... Apparatus and method for inspecting a patterned part of a...

2004-12-14

2008-11-18

Turner, Samuel A (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

C356S516000

Reexamination Certificate

active

07453577

ABSTRACT:
An inspection apparatus is disclosed having an radiation system configured to provide an radiation beam, a beamnsplitter configured to create, from the radiation beam, a first illumination beam and a second illumination beam directed to a planar reference part of a sample and a patterned part of the sample, respectively, and a beam detector configured to detect a detection beam, the detection beam comprising a recombination of radiation scattered from the planar reference part and the patterned part.

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