Metallurgical apparatus – With control means responsive to sensed condition
Reexamination Certificate
2006-05-05
2009-08-04
Kastler, Scott (Department: 1793)
Metallurgical apparatus
With control means responsive to sensed condition
C073S001010
Reexamination Certificate
active
07569178
ABSTRACT:
An apparatus and method for in-situ calibration of a vacuum gauge by absolute method and comparison method, which can carry out absolute calibration using a static type standard for measuring pressures of vacuum chambers by expanding and moving gas between four vacuum chambers of different volumes in order, and comparison calibration of vacuum gauges in an in-situ state without movement of the vacuum gauges according to a method for controlling gas flow through an orifice using a calibrated standard vacuum gauge. Thus, the absolute calibration and the comparative calibration of the vacuum gauges which have been separately carried out by different apparatuses till now can be carried out by just one apparatus, whereby economical efficiency and convenience in calibration of vacuum gauges are maximized.
REFERENCES:
patent: 3537474 (1970-11-01), Rohrer
patent: 3780563 (1973-12-01), Outlaw et al.
patent: 3783678 (1974-01-01), Das et al.
patent: 2006/0124666 (2006-06-01), Takahashi
Chung Kwang Hwa
Hong Seung Soo
Lim In Tae
Shin Yong Hyeon
Akerman & Senterfitt
Kastler Scott
Korea Research Institute of Standards and Science
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