Optics: measuring and testing – Sample – specimen – or standard holder or support
Reexamination Certificate
2005-01-18
2005-01-18
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
Sample, specimen, or standard holder or support
C279S106000, C269S020000, C118S503000
Reexamination Certificate
active
06844929
ABSTRACT:
A device is disclosed for supporting semiconductor wafers or other polished, opaque plates for processing or metrology in a vertical orientation, where the wafer loading and unloading occurs in a horizontal orientation. The device consists of a pallet designed with an opening such that both sides of the wafer are exposed. The wafer is loaded into the pallet to rest on three fixed rest members extending a short distance into the opening. Moving clamp members on the frame are located for movement toward or away from the corresponding rest members. Two cylindrical rest pins are located on axes parallel to the central axis of the opening to permit the wafer to rest under the force of gravity on the rest pins when the frame is rotated to its vertical position. Special provisions are made to minimize the effects of mechanical vibration of the wafer while insuring a robust physical restraint of the wafer within the apparatus without inducing mechanical stresses which could influence the shape of the wafer.
REFERENCES:
patent: 3999866 (1976-12-01), Mathisen
patent: 4860229 (1989-08-01), Abe
patent: 5096291 (1992-03-01), Scott
patent: 5995226 (1999-11-01), Abe
patent: 6504615 (2003-01-01), Abe
patent: 6606154 (2003-08-01), Oda
patent: 6702302 (2004-03-01), Smedt et al.
patent: 6757059 (2004-06-01), Ebert et al.
patent: 363250135 (1988-10-01), None
patent: 401009346 (1989-01-01), None
patent: 00 79245 (2000-12-01), None
patent: 01 77612 (2001-10-01), None
Castner Bryan G.
Freischlad Klaus
Glenn Joe M.
Pridmore Clive M.
Pham Hoa Q.
Phase Shift Technology
Ptak LaValle D.
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