Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-08-08
2006-08-08
Perkey, W. B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S071000
Reexamination Certificate
active
07088427
ABSTRACT:
An in-situ apparatus for high resolution imaging in lithographic steppers and scanners (machines) is described. It comprises a multiple field in-situ imaging objective that images the source directly onto the machine reticle or objective plane. The image on the wafer side of the machine is then recorded electronically or in photo resist. Alternative embodiments create source images at locations before or beyond the wafer plane that can be more conveniently recorded with sensors embedded in the wafer stage chuck.
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Hunter, Jr. Robert O.
McArthur Bruce
Smith Adlai H.
Litel Instruments
Nelson Vivian
Perkey W. B.
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